Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Cylindrical microlens array (CMA) is applied widely in imaging, sensing, and laser machining fields. Among the many techniques for CMA, moulding considered a mass-production method with low-cost good accuracy. Aimed at present problems of CMA moulds, which include low processing efficiency prediction surface topography, this paper focused on fabrication RB-SiC moulds by precision grinding micro-abrasive water jet (MAWJ) textured diamond wheels. The combined rough–fine strategy ceramic mould materials was proposed. experiments were carried out. ultra-precision optimized to obtain high shape accuracy high-quality moulds. It found that using MAWJ-textured wheels, profile error peak-to-valley value (PV) can be further reduced 6.7 μm process.